Semiconductor Application

Mask Total Solution Provider for Lithography

• Reticle SMIF Pod
• Mask Package
• Haze Prevention Equipment
• Professional Cleaning
• Service

Ozone Generators, Analyzers, Monitors and Control Systems

• High Purity Ozone Generator
• Ozone Monitoring
• Ambient/ Safety Ozone Monitor
• Ozone Controller Instrumentation
• Total Ozone Delivery Systems

Surface Particle Inspection & Vacuum Component

• Portable, Handheld Contamination Inspection Light
• Vacuum Components

Aqueous or Solvent Waste Collection

• CS-245A / CS-245S

Wet Chemistry and Wafer Temperature Monitoring

• In-line, Multi-channel Wet Process Analysis System
• Non-contact Real-time Monitoring Of Chemical Composition
• In-situ Wafer Temperature Monitoring